The Advanced Research Center for Nanolithography (ARCNL) performs fundamental research, focusing on the physics and chemistry involved in current and future key technologies in nanolithography, primarily for the semiconductor industry.
ARCNL is a public-private partnership established in 2014 by the Dutch Research Council, the University of Amsterdam, the Vrije Universiteit and semiconductor equipment manufacturer ASML. In 2022 the University of Groningen joined as associate partner. ARCNL is located at Amsterdam Science Park. ARCNL combines the best of two worlds: our research is geared towards establishing scientific excellence, while the topics are intimately connected with the interests of the industrial partner ASML.