The combination of high-harmonic generation (HHG) illumination with coherent diffractive imaging (CDI) marks the beginning of a new era in nanoscale imaging. From early experiments relying on large-scale synchrotron facilities to today’s compact tabletop HHG sources, CDI is evolving from a proof-of-concept technique into a practical imaging tool. HHG-CDI systems offer exceptional flexibility, low cost, compact footprint, and simple architecture, while moving closer to meeting the demands of next-generation nanoscale imaging: high resolution, aberration-free imaging, non-destructive and non-contact operation, high efficiency, 3D reconstruction, and dynamic imaging. Furthermore, these systems enable chemical composition and concentration mapping of samples. As a result, HHG-CDI techniques are finding real-world applications in both scientific research and industrial settings, particularly in semiconductor inspection. In this thesis, we have explored and advanced the field of coherent EUV imaging through the development and application of tabletop HHG sources, ptychographic techniques, and Fourier transform holographic methodologies. Our work provides important steps towards high-resolution, material-sensitive, and spectrally resolved imaging for applications in materials science, nanotechnology, and semiconductor metrology.
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