Simulation of Tin Pl asmas & Theory of Laser Light Absorption
Computer chip
s are desperately needed in our society. The first step of making com
puter chips is to bombard slices of silicone with extreme ultraviolet
(EUV) light; This is called (nano)lithography. Science is therefore
looking for more efficient nanolithography techniques.
I used
computer simulations to investigate a new technique of producing EUV
light. I looked at the amount of light that is produced, but also at
the emission of harmful ions. These results are now being checked in
the lab.
In addition, I have done theoretical research into ab
sorption of laser light in a plasma. Plasma electrons in a light fiel
d behave differently than is often heard, and this affects the streng
th of light absorption. By carefully calculating this, I have derived
a new formula that better describes light absorption. This result is
not only interesting for (future) lithography techniques, but also f
or nuclear fusion.
My simulations show that EUV production by m
eans of a long light pulse can in principle generate more energy than
the current technique. By producing more EUV per drop of tin, comput
er chips can be made even faster. However, this also produces more hi
gh-energy ions, and these can reduce the efficiency of the machine ov
er time; this must be taken into account in practice.
My theor
etical research on light absorption shows that the behaviour of plasm
a electrons in a light field can be taken into account quite easily i
n calculations of light absorption. The influence of light leads to a
simple change of one quantity: the so-called Coulomblogarithm. All i
n all, we expect: the stronger the light, the less absorption takes p
lace.
If this new technique also proves useful in practice, it could mean a faster way of producing computer chips for the chip indu stry. And faster production means greater supply and therefore lower prices.
More information on the thesis to follow.
< /html> DESCRIPTION: Simulation of Tin Plasmas & Theory of Laser Light Abs orption Computer chips are desperately needed in our society. The fir st step of making computer chips is to bombard slices of silicone wit h extreme ultraviolet (EUV) light; This is called (nano)lithography. Science is therefore looking for more efficient nanolithography techn iques.