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Science and Technology of Nanolithography

Science and Technology of Nanolithography

This course topic relates to current developments in society (chip shortages!) and to the leading position of The Netherlands in the nanolithography world.

Course description

In state-of-the-art nanolithography a mask containing the layout of a computer chip is imaged, using extreme ultraviolet (EUV) light, onto a thin layer of photo-resist on top of a semiconductor wafer from which the computer chips are fabricated. In this summer course we will follow the path that the light in said state-of-the-art nanolithography takes, and also address the challenges of illuminating wafers and precisely monitoring the imprints of nanostructures on the wafers.

We will cover the surprisingly rich physics behind some of the fundamental processes occurring in Nanolithography. These range from the interaction of intense laser light with metals, the generation of plasmas, the generation of EUV light in plasmas, the creation of good mirrors out of badly reflecting materials, (sub-)nm metrology on semiconductor structures and the light sources needed for such metrology.

Our contribution to this summer course is sharing our enthusiasm at the Advanced Research Center for Nanolithography (ARCNL) where we do exciting fundamental physics at the highest possible level with a relevance to key technologies in nanolithography. We wish to contribute to the production of ever smarter and smaller electronics, while at the same time pushing the boundaries of our fundamental insight into the workings of nature. This all starts with bright students! 

Some further background: ARCNL is a public-private partnership between the University of Amsterdam, VU Amsterdam, the Dutch Research Council (NWO), and the semiconductor equipment manufacturer ASML. It combines the best of both worlds: the academic focus on scientific excellence and the industry's focus on a well-defined application areas.

You can leave your contact details to be added to our summer 2023 newsletter. 

About this course

Course level

  • Master / Advanced

Course coördinator

  • Oscar Versolato


  • 3 ECTS

Contact hours

  • 45


  • English

Tuition fee

  • €650 - €1150

Additional course information

  • Learning objectives

    By the end of this course, students will be able to: 

    • Reproduce and apply new, advanced physics concepts from areas relevant in nanolithography such as advanced optics, plasma physics, surface science, high-harmonic generation, and new concepts in metrology.

    • Apply and combine basic and advanced physics concepts and new paradigms (e.g. also from BSc courses on solid state physics; atomic, molecular and optical physics) to analyse and solve concrete problems that transcend individual physics domains in state-of-the-art nanolithography, specifically in the nanolithography fields of: Optics for extreme ultraviolet light; Laser-driven plasma light sources; Optical inspection and metrology; Thin films and surfaces and their interactions with light.

    • Identify the scientific challenges and fundamental limits faced by physicists performing research in the field of nanolithography

  • Course schedule

    Take a look at the preliminary course schedule here (subject to change).

    Classes will take place from Monday 4 July until Friday 15 July. In general classes will be during the week between 9am and 17pm (please take exceptions into account). Wednesday afternoons and weekends will be off for optional social activities or personal time. Good to be aware that self-study will be required in your private time (nights and weekends). Saturday 2 July and Saturday 16 July are arrival and departure days (in case you arrange accommodation via our housing service). More details will be shared in the course syllabus which will be shared with the participants in June. 

  • About the course coordinators

    The course will be given by scientists working at the Advanced Center for Nanolithography (ARCNL) in Amsterdam. Course coordinators Dr. Oscar Versolato and Prof. Paul Planken are researchers at the institute and are affiliated with VU and UvA, respectively.

Team VU Amsterdam Summer School

We are here to help!

+31 20 59 86429

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  • Bianca
  • Programme Coordinator
  • Celia
  • Summer and Winter School Officer
Celia VU Amsterdam Summer & Winter School
  • Helena
  • Summer and Winter School Support Assistant
Helena VU Amsterdam Summer and Winter School