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Science and Technology of Nanolithography

Science and Technology of Nanolithography

Unfortunately, this course is not running in July 2022.

We hope you can find another course of your interest, please view our full course offer. This course may be offered during summer 2023. 

Please email us via if you would like to be informed about the course offer for summer 2023.

  • Coordinating lecturer: Oscar Versolato, Paul Planken
  • Other lecturers: Arie den Boef, Paul Planken, Joost Frenken. 
  • Forms of tuition: lectures, tutorials, presentations
  • Forms of assessment: presentations, homework
  • Credits: 3 ECTS
  • Contact hours: 45 hours